Piezoelectric actuator integrated cantilever with tunable spring constant for atom probe

Yusuke Kawai, Takahito Ono, Ernst Meyer, Christoph Gerber, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

A scanning probe for time-of-flight scanning force microscopy (TOF-SFM) with Pb(Zr, Ti)O3 (PZT) thin film actuators is designed and fabricated. This probe is designed to pick up an atom or molecule under SFM mode, and emits them to a TOF mass analyzer using field-assisted evaporation for analyzing its mass (AP; atom probe). For this operation, the probe should be actuated with a large displacement in order to exactly place the end of probe at the front of an extra electrode. The small spring constant of the probe is advantageous for obtaining large actuation, but the instability is caused during surface imaging due to pull-in. Therefore, a tuning actuator, which varies the stiffness of the probe with its active deformation, is integrated. The probe is fabricated using Si micromachining from a SOI wafer on which the PZT is deposited by sputtering. The fabricated probe generates a static displacement up to 15 μm with an applied voltage of 5V, also tuning of the spring constant is demonstrated.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages778-781
Number of pages4
Publication statusPublished - 2006 Oct 24
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/1/2206/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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