Piezoactuator-integrated monolithic microstage with six degrees of freedom

De Yuan Zhang, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

In comparison with miniature XY-stage in terms of driving methods: electrostatic, electromagnetic and piezoelectric actuators, the piezoelectric actuators have high area efficiency but no machinability by conventional microfabrication techniques. In this paper we have proposed the novel fabrication method of a double-layered piezo-stack actuator made from a monolithic PZT plate based on a planer fabrication method, and integrated the actuators into a XYZ-stage with six degrees of freedom, i.e., X, Y, X, θx, θy and θz directions. The stacked piezoactuators were formed on the both side of the PZT plate. The double stacked-piezoactuators, which are arranged around the stage, can stretch in plane or bend to Z-direction. The fabrication method includes dicing, electroplating, and laser machining. After making grooves by dicing, metal electroplating was performed and buried Ni into the grooves, which was done on both side of the PZT plate. After polishing the surface, metal electrodes were formed on an insulating photosensitive polyimide layer. Finally, the complete structure was defined by laser machining. The test results show that the X direction displacement of the actuation arms was about 2 μm when 40 V was applied to both of double-layered piezo-stacked actuators. The Z direction displacement of the actuation beam was about 2 μm when 40 V was only applied to one stacked actuator. These results show the possibility of the microstage with six degrees of freedom.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1518-1521
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003 Jan 1
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Arm
  • Electrodes
  • Electrostatics
  • Insulation
  • Machining
  • Metalworking machines
  • Optical device fabrication
  • Piezoelectric actuators
  • Polyimides
  • Testing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Zhang, D. Y., Ono, T., & Esashi, M. (2003). Piezoactuator-integrated monolithic microstage with six degrees of freedom. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1518-1521). [1217066] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1217066