TY - JOUR
T1 - Pico-thermogravimetric material properties analysis using diamond cantilever beam
AU - Voiculescu, Ioana
AU - Liao, Meiyong
AU - Zakerin, Marjan
AU - Berger, Rüdiger
AU - Ono, Takahito
AU - Toda, Masaya
N1 - Funding Information:
The authors would like to heartily appreciate the helpful discussions and the provision of materials by Dr. Ruediger Berger, and Dr. Filipe Natalio. Part of this work was supported by Japan Society for the Promotion of Science (JSPS) KAKENHI Grant Numbers 15H03999 and 15KK0225. Part of this work was performed at the Micro/Nanomachining Research and Education Center (MNC) and Micro System Integration Center (μSIC) of Tohoku University. Dr. Voiculescu research in Japan was supported by the US Army Research Office and Massachusetts Institute of Technology at Institute of Soldier Nanotechnology (MIT-ISN) for Historically Black Colleges Universities and Minority Institutions (HBCU-MIT) program, award number: W911NF-13-D-001. This research was also supported by Professional Staff Congress(PSC) CUNY cycle 47 and also Romanian Authority for Scientific Research through CNDI–UEFISCDI Grant PN-III-P2-2.1-PED-2016-1937. Ioana Voiculescu is an Associate Professor at The City College of New York in New York. Ioana Voiculescu has a master degree from Politehnica University in Romania and a doctoral degree from the same university in Mechanical Engineering. In 2005 she graduated with a second doctoral degree in the area of MicroElectroMechanical Systems (MEMS) from The George Washington University in Washington DC. She is the author of two US patents, twenty journal papers and several conference papers. Her research interests are in the area of MEMS chemical sensors for detection of hazardous materials fabricated in Complementary Metal Oxide Semiconductor (CMOS). She is also interested to develop biosensors based on live mammalian cells. Meiyong Liao is a Principal Researcher at National Institute for Materials Science, Japan. His research fields are on diamond MEMS/NEMS, photo-electronics devices and their physics. He obtained the Bachelor/Master degrees in Lanzhou University, China and PhD degree in Institute of Semiconductors, Chinese Academy of Sciences. He had conducted research in the Center Of Super-Diamond and Advanced Films (COSDAF) at City University of Hong Kong, Kyoto University in Japan, Centre National de la Recherche Scientifique (CNRS) in France, and Aston University in United Kingdom. He is a member of the Japan Society of Applied Physics (JSAP) and New Diamond Forum. He also severs as an editor of Scientific Reports. Marjan Zakerin is a postdoctoral researcher at Max Planck Institute for polymer research in Mainz. Marjan has a PhD degree in condensed matter Physics from Johannes Gutenberg University. She is an expert of vibration analysis by atomic force microscope, stroboscopic digital holographic microscope, and Laser Doppler vibrometry. Her research interests are in the field of MEMS applications for sensing and material science analysis. She is also a member of the international confederation for thermal analysis and calorimetry since August 2016. Rüdiger Berger is a group leader at the Max Planck Institute for Polymer Research in Mainz, Germany. His main focus is on Scanning Probe Microscopy (SPM) methods for characterization of surface and interface properties. His specialty is the investigation of electrical properties of surfaces at the nanometer scale. Based on SPM and optical tweezers methods novel instruments were developed for the investigation of liquids. Rüdiger Berger studied physics at the Friedrich-Alexander University of Erlangen-Nürnberg. Then he moved to Switzerland where he made his PhD thesis and a PostDoc in the field of micromechanical sensors in the group of Ch. Gerber and J. Gimzewski at the IBM Zurich Research Laboratory. There he was pioneering applications of micromechanical cantilever sensors. Takahito Ono is a Professor in Graduate School of Engineering at Tohoku University. His expertise is in the area of microelectromechnical systems (MEMS), nanoelectromechanical systems (NEMS), silicon based nanofabrication, ultrasensitive sensing based on resonating device, scanning probe technologies, nanoprobe sensing for nanoscale science and engineering. He is the director of The Micro System Integration Center, Tohoku University. He is a member of The Institute of Electrical and Electronics Engineers (IEEE), The Institute of Electrical Engineers of Japan (IEEJ), the Japan Society of Applied Physics (JSAP), and The Japan Society for Precision Engineering (JSPE). Masaya Toda is Associate Professor in the Graduate School of Engineering at Tohoku University. His area of research is advanced sensing based on micro and nanomechanics. He also is conducting the researches for nano mechanical observation system for living cells and nano mechanical temperature sensor. He graduated with a PhD from Osaka University in Japan and conducted researches at Max-Planck-Institute for Polymer Research (MPI-P) in Germany for three years. He is the vice-director of The Micro/Nano-Machining Research and Education Center (MNC), Tohoku University in 2016–2017. He is a member of The Institute of Electrical Engineers of Japan (IEEJ), The Japan Society of Applied Physics (JSAP) and The Japan Society of Mechanical Engineers (JSME).
PY - 2018/3/1
Y1 - 2018/3/1
N2 - This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond cantilever beam. The thermal decomposition of calcium carbonate (CaCO3) was examined using this method and was detected in picogram range. The diamond cantilever beam with CaCO3 particles attached on the tip was introduced in a thermal chamber and the temperature was raised from room temperature to 600 °C. The cantilever beam was operated in vibration mode and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO3 to CaO starts around 500 °C. This novel technique used very small amount of material and variations of the analyzed material pico-mass at different temperatures were observed from the cantilever beam measurements. The thermal analysis expects a release of carbon dioxide (CO2) which in turn decreases the sample mass. Variations of the sample mass are an indication that the thermal decomposition of the analyzed material started. In this research the information about the conversion temperature was repeatable and highly accurate. The diamond cantilever beam is well suited for the thermal measurements because large variations of temperature produced small changes of the resonant frequency. This novel thermogravimetic technic provides accurate information about the analyzed material mass variations at picogram range during the thermal process.
AB - This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond cantilever beam. The thermal decomposition of calcium carbonate (CaCO3) was examined using this method and was detected in picogram range. The diamond cantilever beam with CaCO3 particles attached on the tip was introduced in a thermal chamber and the temperature was raised from room temperature to 600 °C. The cantilever beam was operated in vibration mode and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO3 to CaO starts around 500 °C. This novel technique used very small amount of material and variations of the analyzed material pico-mass at different temperatures were observed from the cantilever beam measurements. The thermal analysis expects a release of carbon dioxide (CO2) which in turn decreases the sample mass. Variations of the sample mass are an indication that the thermal decomposition of the analyzed material started. In this research the information about the conversion temperature was repeatable and highly accurate. The diamond cantilever beam is well suited for the thermal measurements because large variations of temperature produced small changes of the resonant frequency. This novel thermogravimetic technic provides accurate information about the analyzed material mass variations at picogram range during the thermal process.
KW - Diamond cantilever beam
KW - Pico-thermogravimetric analysis
KW - Quality factor
KW - Resonant frequency
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U2 - 10.1016/j.sna.2018.01.004
DO - 10.1016/j.sna.2018.01.004
M3 - Article
AN - SCOPUS:85040227818
VL - 271
SP - 356
EP - 363
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
SN - 0924-4247
ER -