Physics of metal/high-k interfaces

Takashi Nakayama, Kenji Shiraishi, Seiichi Miyazaki, Yasushi Akasaka, Takashi Nakaoka, Kazuyoshi Torii, Akio Ohta, Parhat Ahmet, Kenji Ohmori, Naoto Umezawa, Heiji Watanabe, Toyohiro Chikyow, Yasuo Nara, Hiroshi Iwai, Keisaku Yamada

Research output: Contribution to journalConference articlepeer-review

15 Citations (Scopus)

Abstract

The conventional theory of work functions (Schottky barriers) does not work at pure-metal/high-k-dielectrics interfaces. This occurs due to the selective interface atom bonding reflecting the large ionicity of high-k materials and the characteristic density of p-metal electronic states. Taking into accounts these features, we have constructed a new theory of work functions based on a concept of generalized charge neutrality levels. This theory systematically explains work functions of various gate materials on high-k dielectrics, in particular the unusual behavior of p-metal work functions, and naturally reproduces band offsets at various semiconductor/semiconductor interfaces. copyright The Electrochemical Society.

Original languageEnglish
Pages (from-to)129-140
Number of pages12
JournalECS Transactions
Volume3
Issue number3
DOIs
Publication statusPublished - 2006
EventPhysics and Technology of High-k Gate Dielectrics 4 - 210th Electrochemical Society Meeting - Cancun, Mexico
Duration: 2006 Oct 292006 Nov 3

ASJC Scopus subject areas

  • Engineering(all)

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