Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane

N. I. Fainer, R. V. Pushkarev, S. B. Ehrenburg, S. V. Trubina, V. A. Shestakov, I. S. Merenkov, M. Terauchi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Raman spectroscopy, high-resolution transmission electron microscopy (HRTEM), and EXAFS spectroscopy are used to study the composition and structure of SiCxNy:Fe films obtained by chemical vapor deposition (CVD) in the Fe–Si–C–N–H system from a mixture of hydrogen, ferrocene (C5H5)2Fe, and organosilicon compound 1,1,3,3,5,5–hexamethylcyclotrisilazane (HMCTS) C6H21N3Si3. The films are deposited under low pressures (LPCVD) at 1123–1273 K, and their phase composition at 300–1300 K is predicted using thermodynamic modeling. The obtained films are nanocomposites with amorphous matrices containing α-Fe crystallites and carbon clusters with a size of 5–10 nm.

Original languageEnglish
Pages (from-to)1588-1595
Number of pages8
JournalJournal of Structural Chemistry
Volume59
Issue number7
DOIs
Publication statusPublished - 2018 Dec 1

Keywords

  • 1,1,3,3,5,5-hexamethylcyclotrisilazane
  • CVD
  • HRTEM and EXAFS spectroscopy
  • Raman
  • ferrocene
  • nanocomposite films
  • thermodynamic modeling

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Inorganic Chemistry
  • Materials Chemistry

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