PHYSICAL VAPOR DEPOSITED WEAR RESISTANT COATINGS OF TiC, TiN AND Ti (C multiplied by (times) N) FORMED AT LOW SUBSTRATE TEMPERATURE.

Yuji Enomoto, Kazushi Yamanaka, Kazuyuki Mizuhara

Research output: Contribution to conferencePaperpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages209-215
Number of pages7
Publication statusPublished - 1982 Dec 1

ASJC Scopus subject areas

  • Engineering(all)

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