Photothermoelastic evaluation for small mechanical structures

Kazuhiro Hane, Takashi Naito, Shuzo Hattori

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

We describe a photothermal technique for testing the mechanical properties of small mechanical structures. Irradiation with chopped laser light on platelike or beamlike structures produces flexural vibration caused by thermoelastic bending. By monitoring the vibration, we can develop useful techniques for evaluating thickness, size attachment, tension, and adhesion of small mechanical structures. The technique will he useful for inspecting small mechanical structures that are fabricated with lithographic processes for various high technology applications.

Original languageEnglish
Pages (from-to)72-77
Number of pages6
JournalApplied optics
Volume30
Issue number1
DOIs
Publication statusPublished - 1991 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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