Photothermal vibration for a cantilever placed near a planar wall in low-vacuum region

S. Inaba, K. Akaishi, T. Mori, K. Hane

Research output: Contribution to journalArticle

Abstract

The pressure dependence of the resonant frequency of a cantilever type solid membrane which was vibrated photothermally in air in low-vacuum was investigated, and a linear response was observed. When a planar wall was placed near the membrane, the effect of the wall on the frequency response was also investigated. The resonant frequency decreased corresponding to the narrowing of the space between the wall and the membrane. These experimental results are discussed theoretically with a vibration model for the membrane.

Original languageEnglish
Pages (from-to)599-601
Number of pages3
JournalVacuum
Volume44
Issue number5-7
DOIs
Publication statusPublished - 1993 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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