Photothermal effect contribution on film quality improvement in excimer-laser induced metal CVD

H. Yokoyama, F. Uesugi, S. Kishida, K. Washio

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

KrF excimer laser induced Cr film deposition from Cr(CO)6 has been studied. Remarkable film quality dependence on laser intensity suggested the photothermal effect contribution of intensive uv laser pulses in the CVD process. A cw Ar-ion laser light and its second harmonic light were used, to separate photochemical and photothermal effects. As a result, photoinduced surface heating has been found to be very important for obtaining good quality metallic films in KrF laser induced Cr film CVD.

Original languageEnglish
Pages (from-to)25-30
Number of pages6
JournalApplied Physics A Solids and Surfaces
Volume37
Issue number1
DOIs
Publication statusPublished - 1985 May
Externally publishedYes

Keywords

  • 68.20
  • 68.55
  • 81.10

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy (miscellaneous)

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