Abstract
KrF excimer laser induced Cr film deposition from Cr(CO)6 has been studied. Remarkable film quality dependence on laser intensity suggested the photothermal effect contribution of intensive uv laser pulses in the CVD process. A cw Ar-ion laser light and its second harmonic light were used, to separate photochemical and photothermal effects. As a result, photoinduced surface heating has been found to be very important for obtaining good quality metallic films in KrF laser induced Cr film CVD.
| Original language | English |
|---|---|
| Pages (from-to) | 25-30 |
| Number of pages | 6 |
| Journal | Applied Physics A Solids and Surfaces |
| Volume | 37 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1985 May |
| Externally published | Yes |
Keywords
- 68.20
- 68.55
- 81.10
ASJC Scopus subject areas
- Materials Science(all)
- Engineering(all)
- Physics and Astronomy (miscellaneous)
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Cite this
Yokoyama, H., Uesugi, F., Kishida, S., & Washio, K. (1985). Photothermal effect contribution on film quality improvement in excimer-laser induced metal CVD. Applied Physics A Solids and Surfaces, 37(1), 25-30. https://doi.org/10.1007/BF00617865