Photothermal effect contribution on film quality improvement in excimer-laser induced metal CVD

H. Yokoyama; F. Uesugi; S. Kishida; K. Washio

doi:10.1007/BF00617865

Photothermal effect contribution on film quality improvement in excimer-laser induced metal CVD

H. Yokoyama, F. Uesugi, S. Kishida, K. Washio

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

KrF excimer laser induced Cr film deposition from Cr(CO)₆ has been studied. Remarkable film quality dependence on laser intensity suggested the photothermal effect contribution of intensive uv laser pulses in the CVD process. A cw Ar-ion laser light and its second harmonic light were used, to separate photochemical and photothermal effects. As a result, photoinduced surface heating has been found to be very important for obtaining good quality metallic films in KrF laser induced Cr film CVD.

Original language	English
Pages (from-to)	25-30
Number of pages	6
Journal	Applied Physics A Solids and Surfaces
Volume	37
Issue number	1
DOIs	https://doi.org/10.1007/BF00617865
Publication status	Published - 1985 May
Externally published	Yes

Keywords

68.20
68.55
81.10

ASJC Scopus subject areas

Materials Science(all)
Engineering(all)
Physics and Astronomy (miscellaneous)

Access to Document

10.1007/BF00617865

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abstract = "KrF excimer laser induced Cr film deposition from Cr(CO)6 has been studied. Remarkable film quality dependence on laser intensity suggested the photothermal effect contribution of intensive uv laser pulses in the CVD process. A cw Ar-ion laser light and its second harmonic light were used, to separate photochemical and photothermal effects. As a result, photoinduced surface heating has been found to be very important for obtaining good quality metallic films in KrF laser induced Cr film CVD.",

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AU - Uesugi, F.

AU - Kishida, S.

AU - Washio, K.

PY - 1985/5

Y1 - 1985/5

N2 - KrF excimer laser induced Cr film deposition from Cr(CO)6 has been studied. Remarkable film quality dependence on laser intensity suggested the photothermal effect contribution of intensive uv laser pulses in the CVD process. A cw Ar-ion laser light and its second harmonic light were used, to separate photochemical and photothermal effects. As a result, photoinduced surface heating has been found to be very important for obtaining good quality metallic films in KrF laser induced Cr film CVD.

AB - KrF excimer laser induced Cr film deposition from Cr(CO)6 has been studied. Remarkable film quality dependence on laser intensity suggested the photothermal effect contribution of intensive uv laser pulses in the CVD process. A cw Ar-ion laser light and its second harmonic light were used, to separate photochemical and photothermal effects. As a result, photoinduced surface heating has been found to be very important for obtaining good quality metallic films in KrF laser induced Cr film CVD.

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