Photonic crystals for the visible range fabricated by autocloning technique and their application

T. Sato, K. Miura, N. Ishino, Yasuo Ohtera, T. Tamamura, S. Kawakami

Research output: Contribution to journalArticlepeer-review

71 Citations (Scopus)

Abstract

We fabricate photonic crystals for the visible range by the 'autocloning' technique, in which multilayers are stacked by an appropriate combination of sputter deposition and sputter etching. TiO2/SiO2 and Ta2O5/SiO2 are chosen as materials since they are transparent in the range and give a high contrast of refractive indices. The fabrication technique has flexibility regarding materials and size and is very reliable and reproducible even if the pitch is less than 0.2 μm. We also study the application of photonic crystals to birefringent elements such as waveplates and polarization selective gratings and experimentally verify that they are useful for optical pick-up systems.

Original languageEnglish
Pages (from-to)63-70
Number of pages8
JournalOptical and Quantum Electronics
Volume34
Issue number1-3
DOIs
Publication statusPublished - 2002 Jan 1

Keywords

  • Autocloning
  • Birefringence
  • Photonic crystal
  • Polarization selective grating

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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