Photonic crystals for the visible range fabricated by autocloning technique and their application

T. Sato; K. Miura; N. Ishino; Y. Ohtera; T. Tamamura; S. Kawakami

doi:10.1023/A:1013382711983

Photonic crystals for the visible range fabricated by autocloning technique and their application

T. Sato, K. Miura, N. Ishino, Y. Ohtera, T. Tamamura, S. Kawakami

ENG - Communications Engineering

Research output: Contribution to journal › Article › peer-review

76 Citations (Scopus)

Abstract

We fabricate photonic crystals for the visible range by the 'autocloning' technique, in which multilayers are stacked by an appropriate combination of sputter deposition and sputter etching. TiO₂/SiO₂ and Ta₂O₅/SiO₂ are chosen as materials since they are transparent in the range and give a high contrast of refractive indices. The fabrication technique has flexibility regarding materials and size and is very reliable and reproducible even if the pitch is less than 0.2 μm. We also study the application of photonic crystals to birefringent elements such as waveplates and polarization selective gratings and experimentally verify that they are useful for optical pick-up systems.

Original language	English
Pages (from-to)	63-70
Number of pages	8
Journal	Optical and Quantum Electronics
Volume	34
Issue number	1-3
DOIs	https://doi.org/10.1023/A:1013382711983
Publication status	Published - 2002 Jan

Keywords

Autocloning
Birefringence
Photonic crystal
Polarization selective grating

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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title = "Photonic crystals for the visible range fabricated by autocloning technique and their application",

abstract = "We fabricate photonic crystals for the visible range by the 'autocloning' technique, in which multilayers are stacked by an appropriate combination of sputter deposition and sputter etching. TiO2/SiO2 and Ta2O5/SiO2 are chosen as materials since they are transparent in the range and give a high contrast of refractive indices. The fabrication technique has flexibility regarding materials and size and is very reliable and reproducible even if the pitch is less than 0.2 μm. We also study the application of photonic crystals to birefringent elements such as waveplates and polarization selective gratings and experimentally verify that they are useful for optical pick-up systems.",

keywords = "Autocloning, Birefringence, Photonic crystal, Polarization selective grating",

author = "T. Sato and K. Miura and N. Ishino and Y. Ohtera and T. Tamamura and S. Kawakami",

note = "Funding Information: The authors would like to thank Prof O. Hanaizumi and Dr T. Kawashima for their helpful discussions. Part of this study was sponsored by the Special Correlation Funds for Promoting Science and Technology from the Science and Technology Agency, the Telecommunications Advancement Organization of Japan (TAO), and a grant-in-aid for Scientific Research (B) from the Japan Society for the Promotion of Science.",

year = "2002",

month = jan,

doi = "10.1023/A:1013382711983",

language = "English",

volume = "34",

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TY - JOUR

T1 - Photonic crystals for the visible range fabricated by autocloning technique and their application

AU - Sato, T.

AU - Miura, K.

AU - Ishino, N.

AU - Ohtera, Y.

AU - Tamamura, T.

AU - Kawakami, S.

N1 - Funding Information: The authors would like to thank Prof O. Hanaizumi and Dr T. Kawashima for their helpful discussions. Part of this study was sponsored by the Special Correlation Funds for Promoting Science and Technology from the Science and Technology Agency, the Telecommunications Advancement Organization of Japan (TAO), and a grant-in-aid for Scientific Research (B) from the Japan Society for the Promotion of Science.

PY - 2002/1

Y1 - 2002/1

N2 - We fabricate photonic crystals for the visible range by the 'autocloning' technique, in which multilayers are stacked by an appropriate combination of sputter deposition and sputter etching. TiO2/SiO2 and Ta2O5/SiO2 are chosen as materials since they are transparent in the range and give a high contrast of refractive indices. The fabrication technique has flexibility regarding materials and size and is very reliable and reproducible even if the pitch is less than 0.2 μm. We also study the application of photonic crystals to birefringent elements such as waveplates and polarization selective gratings and experimentally verify that they are useful for optical pick-up systems.

AB - We fabricate photonic crystals for the visible range by the 'autocloning' technique, in which multilayers are stacked by an appropriate combination of sputter deposition and sputter etching. TiO2/SiO2 and Ta2O5/SiO2 are chosen as materials since they are transparent in the range and give a high contrast of refractive indices. The fabrication technique has flexibility regarding materials and size and is very reliable and reproducible even if the pitch is less than 0.2 μm. We also study the application of photonic crystals to birefringent elements such as waveplates and polarization selective gratings and experimentally verify that they are useful for optical pick-up systems.

KW - Autocloning

KW - Birefringence

KW - Photonic crystal

KW - Polarization selective grating

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DO - 10.1023/A:1013382711983

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SN - 0306-8919

VL - 34

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EP - 70

JO - Optical and Quantum Electronics

JF - Optical and Quantum Electronics

IS - 1-3

ER -

Photonic crystals for the visible range fabricated by autocloning technique and their application

Abstract

Keywords

ASJC Scopus subject areas

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