Photonic crystal switch by inserting nano-crystal defects using MEMS actuator

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

Abstract

A novel photonic crystal switch by inserting crystal defects using a MEMS actuator was proposed. Optical parameters for obtaining photonic crystal switch were determined. The number of air holes necessary for light switching, and allowable gaps between the air hole and silicon rod, were decided by a FDTD simulation. The fabrication techniques using electron beam lithography, fast atom beam etching and HF gas-phase etching were proposed.

Original languageEnglish
Title of host publication2003 IEEE/LEOS International Conference on Optical MEMS
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages107-108
Number of pages2
ISBN (Electronic)078037830X, 9780780378308
DOIs
Publication statusPublished - 2003 Jan 1
Event2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States
Duration: 2003 Aug 182003 Aug 21

Publication series

Name2003 IEEE/LEOS International Conference on Optical MEMS

Other

Other2003 IEEE/LEOS International Conference on Optical MEMS
CountryUnited States
CityWaikoloa
Period03/8/1803/8/21

Keywords

  • Actuators
  • Atom optics
  • Electron optics
  • Etching
  • Finite difference methods
  • Micromechanical devices
  • Optical switches
  • Photonic crystals
  • Silicon
  • Time domain analysis

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Photonic crystal switch by inserting nano-crystal defects using MEMS actuator'. Together they form a unique fingerprint.

  • Cite this

    Kanamori, Y., Inoue, K., Horie, K., & Hane, K. (2003). Photonic crystal switch by inserting nano-crystal defects using MEMS actuator. In 2003 IEEE/LEOS International Conference on Optical MEMS (pp. 107-108). [1233489] (2003 IEEE/LEOS International Conference on Optical MEMS). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2003.1233489