Photoluminescence emission from GaAs nanodisks in GaAs/AlGaAs nanopillar arrays fabricated by neutral beam etching

Daisuke Ohori, Atsuhiko Fukuyama, Kentaro Sakai, Akio Higo, Cedric Thomas, Seiji Samukawa, Tetsuo Ikari

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

GaAs quantum nanodisks (QNDs) in nanopillar (NP) arrays are considered to be an attractive candidate for photonic device applications. We report a damageless fabrication technique that can be used to produce large-area lattice-matched GaAs/AlGaAs heterostructure NP arrays through the use of a bio-template and neutral beam etching. We have successfully realized GaAs QNDs in NPs owing to nanoscale iron oxide masks included in poly(ethylene glycol)-decorated ferritin protein shells. We observed for first time the photoluminescence emission from asetched GaAs QNDs and confirmed quantum confinement by quantum mechanical calculation. Our methodology is vital for high-efficiency pillarbased optoelectronic devices such as NP laser diodes.

Original languageEnglish
Article number050308
JournalJapanese journal of applied physics
Volume56
Issue number5
DOIs
Publication statusPublished - 2017 May

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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