Photolithography on optical fiber and micro-fabrication of fiber-optic devices controlling evanescent field

Kazuhiro Hane, J. H. Song, M. Sasaki, Y. Taguchi, H. Shimoda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

New photolithographic fabrications of micro fiber-optic devices for telecommunication are reported. A variable attenuator and a tunable filter have been designed based on an evanescent field interaction. The devices have been fabricated by applying surface and bulk micromachining to the optical fiber fixed on the Si substrate. Since the optical fiber is side-polished, the light wave interacts through evanescent field with micro Si structures fabricated on the optical fiber. The initial optical properties in light attenuation and wavelength dependent transmittance have been measured. The proposed fabrication technique will enable a new type of fiber optic devices in telecommunication.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages198-201
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003 Jan 1
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Lithography
  • Optical attenuators
  • Optical control
  • Optical device fabrication
  • Optical fiber devices
  • Optical fiber filters
  • Optical fibers
  • Optical surface waves
  • Optical variables control
  • Telecommunication control

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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