Photoinduced deformation of a-C thin films prepared by RF magnetron sputtering

Masami Aono, Hisashi Miyazaki, Nobuaki Kitazawa, Yohei Sato, Masami Terauchi

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Photoinduced deformation of a-C thin films prepared by RF magnetron sputtering'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science