Photoelectron spectra from a periodic multilayer of (Mo/B4C)30/Si were measured by changing the x-ray glancing angle. The angular dependencies of the photoelectron intensities of O1s and Mo3d revealed the atomic depth profiles of the Mo oxide overlayer, and the compositions of the MoO3 upper layer and MoO2 lower layer. Furthermore, we observed enhancement of photoelectron emission by means of x-ray standing waves generated near the multilayer surface during x-ray diffraction from the superlattice.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)