Photoelectron spectra enhanced by x-ray total reflection and diffraction from periodic multilayer

Kouichi Hayashi, Shin'ichi Kawato, Toshihisa Horiuchi, Kazumi Matsushige, Yoshinori Kitajima, Hisataka Takenaka, Jun Kawai

Research output: Contribution to journalArticlepeer-review

Abstract

Photoelectron spectra from a periodic multilayer of (Mo/B 4C)30/Si were measured by changing the x-ray glancing angle. The angular dependencies of the photoelectron intensities of O 1s and Mo 3d revealed the atomic depth profiles of the Mo oxide overlayer, and the compositions of the MoO3 upper layer and MoO2 lower layer. Furthermore, we observed enhancement of photoelectron emission by means of x-ray standing waves generated near the multilayer surface during x-ray diffraction from the superlattice.

Original languageEnglish
Number of pages1
JournalApplied Physics Letters
Publication statusPublished - 1995 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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