Photoelectron spectra from a periodic multilayer of (Mo/B 4C)30/Si were measured by changing the x-ray glancing angle. The angular dependencies of the photoelectron intensities of O 1s and Mo 3d revealed the atomic depth profiles of the Mo oxide overlayer, and the compositions of the MoO3 upper layer and MoO2 lower layer. Furthermore, we observed enhancement of photoelectron emission by means of x-ray standing waves generated near the multilayer surface during x-ray diffraction from the superlattice.
|Number of pages||1|
|Journal||Applied Physics Letters|
|Publication status||Published - 1995|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)