TY - JOUR
T1 - Photoelectron intensity oscillation as a probe to monitor Si layer-by-layer growth
AU - Enta, Yoshiharu
AU - Miyamoto, Nobuo
AU - Takakuwa, Yuji
AU - Kato, Hiroo
N1 - Funding Information:
We would like to thank Professor Suemitsu for making a number of helpful suggestions.T his work was supportedi n part by Grant-in-Aid for Scientific Research on Priority Areas from the Ministry of Education, Science and Culture of Japan. This work has been performedu nder the approval of the Photon Factory Program Advisory Committee( Proposal No. 92G293).
PY - 1994/12/2
Y1 - 1994/12/2
N2 - Photoelectron intensities from the surface state on Si(100)2 × 1 periodically oscillate during Si epitaxial growth, for which an alternation between 2 × 1 and 1 × 2 surface reconstructions has been proposed as an origin [Y. Enta et al., Surf. Sci. 313 (1994) L797]. To confirm the scheme more directly, we have performed synchrotron radiation ultraviolet photoelectron spectroscopy (UPS) measurements on both 2 × 1 and 1 × 2 surfaces. As a result, an apparent difference between the two valence-band spectra was observed, whose difference spectrum presented a good agreement with the dependence of the oscillation amplitude on the photoelectron energy, proving the validity of our previous proposal. A selection rule argument on the initial and final state symmetries yields an insight on the origin for the oscillation. With its very high sensitivity, UPS oscillation can be a powerful tool for monitoring the layer-by-layer growth at surfaces.
AB - Photoelectron intensities from the surface state on Si(100)2 × 1 periodically oscillate during Si epitaxial growth, for which an alternation between 2 × 1 and 1 × 2 surface reconstructions has been proposed as an origin [Y. Enta et al., Surf. Sci. 313 (1994) L797]. To confirm the scheme more directly, we have performed synchrotron radiation ultraviolet photoelectron spectroscopy (UPS) measurements on both 2 × 1 and 1 × 2 surfaces. As a result, an apparent difference between the two valence-band spectra was observed, whose difference spectrum presented a good agreement with the dependence of the oscillation amplitude on the photoelectron energy, proving the validity of our previous proposal. A selection rule argument on the initial and final state symmetries yields an insight on the origin for the oscillation. With its very high sensitivity, UPS oscillation can be a powerful tool for monitoring the layer-by-layer growth at surfaces.
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U2 - 10.1016/0169-4332(94)90236-4
DO - 10.1016/0169-4332(94)90236-4
M3 - Article
AN - SCOPUS:0028762120
VL - 82-83
SP - 327
EP - 331
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - C
ER -