Photodiodes Fabricated by Micromachining for Mechatronics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	401-404
Number of pages	4
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	119
Issue number	42591
DOIs	https://doi.org/10.1541/ieejsmas.119.401
Publication status	Published - 1999

ASJC Scopus subject areas

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title = "Photodiodes Fabricated by Micromachining for Mechatronics",

author = "Kazuhiro Hane and Mimoru Sasaki",

year = "1999",

doi = "10.1541/ieejsmas.119.401",

language = "English",

volume = "119",

pages = "401--404",

journal = "IEEJ Transactions on Sensors and Micromachines",

issn = "1341-8939",

publisher = "The Institute of Electrical Engineers of Japan",

number = "42591",

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AU - Sasaki, Mimoru

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JO - IEEJ Transactions on Sensors and Micromachines

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