Photodiodes Fabricated by Micromachining for Mechatronics

Kazuhiro Hane, Mimoru Sasaki

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)401-404
Number of pages4
JournalIEEJ Transactions on Sensors and Micromachines
Volume119
Issue number42591
DOIs
Publication statusPublished - 1999 Jan 1

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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