Photodiodes Fabricated by Micromachining for Mechatronics

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	401-404
Number of pages	4
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	119
Issue number	42591
DOIs	https://doi.org/10.1541/ieejsmas.119.401
Publication status	Published - 1999 Jan 1

Cite this

@article{63b92e6a28ff4f868937dca0d2eeff6b,

title = "Photodiodes Fabricated by Micromachining for Mechatronics",

author = "Kazuhiro Hane and Mimoru Sasaki",

year = "1999",

month = jan,

day = "1",

doi = "10.1541/ieejsmas.119.401",

language = "English",

volume = "119",

pages = "401--404",

journal = "IEEJ Transactions on Sensors and Micromachines",

issn = "1341-8939",

publisher = "The Institute of Electrical Engineers of Japan",

number = "42591",

}

TY - JOUR

T1 - Photodiodes Fabricated by Micromachining for Mechatronics

AU - Hane, Kazuhiro

AU - Sasaki, Mimoru

PY - 1999/1/1

Y1 - 1999/1/1

UR - http://www.scopus.com/inward/record.url?scp=85024440611&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85024440611&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.119.401

DO - 10.1541/ieejsmas.119.401

M3 - Article

AN - SCOPUS:85024440611

VL - 119

SP - 401

EP - 404

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

SN - 1341-8939

IS - 42591

ER -