Original language | English |
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Pages (from-to) | 401-404 |
Number of pages | 4 |
Journal | IEEJ Transactions on Sensors and Micromachines |
Volume | 119 |
Issue number | 42591 |
DOIs | |
Publication status | Published - 1999 |
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering