Abstract
We have developed an integrated micro-probe with improved detection efficiency for apertureless NSOM by using micromachining techniques; we call this probe a 'photocantilever'. A photocantilever is an integrated microcantilever with a pn-junction at its end; it is fabricated using micromachining techniques. It has achieve higher collection efficiency than conventional near-field scanning optical microscopy(NSOM) probes because the detector is placed close to the scatterer. Two new types of NSOM can be performed using this photocantilever: totally-internal-reflection-illumination-based NSOM and differential NSOM. Both provide NSOMs with high spatial resolution. The photocantilever enables apertureless NSOM with high collection efficiency and high resolution.
| Original language | English |
|---|---|
| Pages (from-to) | 21-31 |
| Number of pages | 11 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3791 |
| Publication status | Published - 1999 Dec 1 |
| Externally published | Yes |
| Event | Proceedings of the 1999 Near-Field Optics: Physics, Devices, and Information Processing - Denver, CO, USA Duration: 1999 Jul 22 → 1999 Jul 23 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering