Photocantilever: an integrated micro-probe for near-field optical microscopy

Kenji Fukuzawa, Yuriko Tanaka, Hiroki Kuwano, Hiroshi Yoshikawa, Toshifumi Ohkubo, Tadashi Kato

Research output: Contribution to journalConference articlepeer-review


We have developed an integrated micro-probe with improved detection efficiency for apertureless NSOM by using micromachining techniques; we call this probe a 'photocantilever'. A photocantilever is an integrated microcantilever with a pn-junction at its end; it is fabricated using micromachining techniques. It has achieve higher collection efficiency than conventional near-field scanning optical microscopy(NSOM) probes because the detector is placed close to the scatterer. Two new types of NSOM can be performed using this photocantilever: totally-internal-reflection-illumination-based NSOM and differential NSOM. Both provide NSOMs with high spatial resolution. The photocantilever enables apertureless NSOM with high collection efficiency and high resolution.

Original languageEnglish
Pages (from-to)21-31
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1999 Dec 1
Externally publishedYes
EventProceedings of the 1999 Near-Field Optics: Physics, Devices, and Information Processing - Denver, CO, USA
Duration: 1999 Jul 221999 Jul 23

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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