Photocantilever: an integrated micro-probe for near-field optical microscopy

Kenji Fukuzawa; Yuriko Tanaka; Hiroki Kuwano; Hiroshi Yoshikawa; Toshifumi Ohkubo; Tadashi Kato

Photocantilever: an integrated micro-probe for near-field optical microscopy

Kenji Fukuzawa, Yuriko Tanaka, Hiroki Kuwano, Hiroshi Yoshikawa, Toshifumi Ohkubo, Tadashi Kato

Research output: Contribution to journal › Conference article › peer-review

Abstract

We have developed an integrated micro-probe with improved detection efficiency for apertureless NSOM by using micromachining techniques; we call this probe a 'photocantilever'. A photocantilever is an integrated microcantilever with a pn-junction at its end; it is fabricated using micromachining techniques. It has achieve higher collection efficiency than conventional near-field scanning optical microscopy(NSOM) probes because the detector is placed close to the scatterer. Two new types of NSOM can be performed using this photocantilever: totally-internal-reflection-illumination-based NSOM and differential NSOM. Both provide NSOMs with high spatial resolution. The photocantilever enables apertureless NSOM with high collection efficiency and high resolution.

Original language	English
Pages (from-to)	21-31
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3791
Publication status	Published - 1999 Dec 1
Externally published	Yes
Event	Proceedings of the 1999 Near-Field Optics: Physics, Devices, and Information Processing - Denver, CO, USA Duration: 1999 Jul 22 → 1999 Jul 23

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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Photocantilever : an integrated micro-probe for near-field optical microscopy. / Fukuzawa, Kenji; Tanaka, Yuriko; Kuwano, Hiroki; Yoshikawa, Hiroshi; Ohkubo, Toshifumi; Kato, Tadashi.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3791, 01.12.1999, p. 21-31.

Research output: Contribution to journal › Conference article › peer-review

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abstract = "We have developed an integrated micro-probe with improved detection efficiency for apertureless NSOM by using micromachining techniques; we call this probe a 'photocantilever'. A photocantilever is an integrated microcantilever with a pn-junction at its end; it is fabricated using micromachining techniques. It has achieve higher collection efficiency than conventional near-field scanning optical microscopy(NSOM) probes because the detector is placed close to the scatterer. Two new types of NSOM can be performed using this photocantilever: totally-internal-reflection-illumination-based NSOM and differential NSOM. Both provide NSOMs with high spatial resolution. The photocantilever enables apertureless NSOM with high collection efficiency and high resolution.",

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AU - Ohkubo, Toshifumi

AU - Kato, Tadashi

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