Phosphorus profile control in Ge by Si delta layers

Y. Yamamoto, P. Zaumseil, R. Kurps, J. Murota, B. Tillack

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The impact of Si delta layer on phosphorus (P) diffusion in germanium (Ge) is investigated. A Ge cap / in-situ P-doped Ge / Ge buffer layer stack is deposited and post-annealed using a single wafer reduced pressure chemical vapor deposition (RPCVD) tool. The P doping level in Ge is ~5×1019 cm-3. In the case of samples without Si delta layer, P diffusion / segregation and desorption from the Ge surface happened during Ge cap layer deposition at 550°C resulting in dopant dose reduction and profile broadening. By interposing the P-doped Ge layer by Si delta layers, the P diffusion is suppressed. The diffused P is piled-up at the position of the Si delta layers. The P diffusion suppression effect by the Si delta layer is observed after postannealing even at 650°C. This effect is pronounced by increasing the Si dose. XRD-reciprocal space mapping shows that the Si delta layer is pseudomorphic to the Ge lattice, indicating that the Si atoms are on lattice site. After postannealing, Si diffusion is observed but no Ge crystal degradation was evident. Enhanced Si diffusion is observed by presence of P. Based on these results, the P diffusion suppression seems to be caused by the replacement of substitutional Si by diffused P.

Original languageEnglish
Title of host publicationSiGe, Ge, and Related Compounds 5
Subtitle of host publicationMaterials, Processing, and Devices
PublisherElectrochemical Society Inc.
Number of pages7
ISBN (Print)9781607683575
Publication statusPublished - 2013
Externally publishedYes
Event5th SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 220th ECS Meeting - Honolulu, HI, United States
Duration: 2012 Oct 72012 Oct 12

Publication series

NameECS Transactions
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737


Other5th SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 220th ECS Meeting
Country/TerritoryUnited States
CityHonolulu, HI

ASJC Scopus subject areas

  • Engineering(all)


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