Phase velocity control of surface acoustic waves based on surface shorting and electrical field application using MEMS switches

Jan H. Kuypers, Marek E. Schmidt, Shuji Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

We have investigated controlling the phase velocity of a surface acoustic wave (SAW) by a microelectromechanical switch fabricated on a high coupling piezoelectric substrate. The principle is based on the interaction of the evanescent surface potential of the SAW with the conductive switch. In theory tuning of the velocity in the range given by ν0 and νm, i.e. the velocity for a SAW on a free and metallized substrate, is possible. We have achieved up to 17.6 m/s (0.44 %) velocity tuning on 128°YX LiNbO3. A maximum velocity sensitivity of Δν/ν of 15×10-3/V and phase sensitivity of 700°/V was measured. This is five orders of magnitude larger than values obtained for electrical field tuning.

Original languageEnglish
Title of host publication2007 IEEE Ultrasonics Symposium Proceedings, IUS
Pages1233-1238
Number of pages6
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2007 IEEE Ultrasonics Symposium, IUS
Country/TerritoryUnited States
CityNew York, NY
Period07/10/2807/10/31

Keywords

  • Electrical field tuning
  • Surface acoustic waves
  • Surface shorting effect
  • Tunable SAW device
  • Velocity tuning

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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