Phase shifting method for non-sinusoidal interference fringes with phase shift error

Songzhe Lian, Haiquan Yang, Hiroyuki Kudo, Hidekazu Takano, Atsushi Momose

Research output: Contribution to journalArticle

Abstract

When applying phase shifting interferometry to practical phase measurement, the wave may become non-sinusoidal, and could include some phase shift errors. Prior phase shift algorithms are primarily used for sinusoidal cases, and can cause system errors when used for these non-sinusoidal interference. We propose two phase recovery methods for non-sinusoidal interference fringes: Specifically, a least-squares-based fitting algorithm that eliminates system errors using a sufficient number of measured images, and a Fourier transform-based method that effectively suppresses system errors using a lower (or insufficient) number of images. Simulation and experimental results verify the efficacy of the proposed methods.

Original languageEnglish
Article number112005
JournalJapanese journal of applied physics
Volume58
Issue number11
DOIs
Publication statusPublished - 2019 Jan 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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