Abstract
Phase shifter is an important part of optical waveguide circuits as used in interferometer. However, it is not always easy to generate a large phase shift in a small region. Here, a variable phase-shifter operating as delay-line of silicon waveguide was designed and fabricated by silicon micromachining. The proposed phase-shifter consists of a freestanding submicron-wide silicon waveguide with two waveguide couplers and an ultrasmall silicon comb-drive actuator. The position of the freestanding waveguide is moved by the actuator to vary the total optical path. Phaseshift was measured in a Mach-Zehnder interferometer to be 3.0π at the displacement of 1.0 urn at the voltage of 31V. The dimension of the fabricated device is 50μm wide and 85μm long.
Original language | English |
---|---|
Pages (from-to) | 7031-7037 |
Number of pages | 7 |
Journal | Optics Express |
Volume | 18 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2010 Mar 29 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics