Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator

Taro Ikeda, Kazunori Takahashi, Yoshiaki Kanamori, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)


Phase shifter is an important part of optical waveguide circuits as used in interferometer. However, it is not always easy to generate a large phase shift in a small region. Here, a variable phase-shifter operating as delay-line of silicon waveguide was designed and fabricated by silicon micromachining. The proposed phase-shifter consists of a freestanding submicron-wide silicon waveguide with two waveguide couplers and an ultrasmall silicon comb-drive actuator. The position of the freestanding waveguide is moved by the actuator to vary the total optical path. Phaseshift was measured in a Mach-Zehnder interferometer to be 3.0π at the displacement of 1.0 urn at the voltage of 31V. The dimension of the fabricated device is 50μm wide and 85μm long.

Original languageEnglish
Pages (from-to)7031-7037
Number of pages7
JournalOptics Express
Issue number7
Publication statusPublished - 2010 Mar 29

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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