PH sensitivity of nanocrystalline diamond films

P. Christiaens, M. H. Abouzar, A. Poghossian, T. Wagner, N. Bijnens, O. A. Williams, M. Daenen, K. Haenen, O. Douhéret, J. D'Haen, Z. Mekhalif, M. J. Schöning, P. Wagner

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


The pH-sensitive properties of hydrogen- and oxygen-terminated nanocrystalline diamond (NCD) films have been investigated using a field-effect-based capacitive electrolyte-diamond-insulator-semiconductor (EDIS) structure as transducer. The NCD thin films (100-500 nm) were grown on p-Si-SiO 2 substrates by microwave plasma-enhanced chemical vapour deposition. The electrochemical characterisation of EDIS sensors with NCD films of different thicknesses has been performed in buffer solutions of pH 3 to pH 11 by means of capacitance-voltage and constant-capacitance methods. The developed EDIS sensors with O-terminated NCD surfaces show an average pH-sensitivity of 38 mV/pH. A slightly smaller pH-sensitivity of 29-36 mV/pH was observed for the EDIS structure with H-terminated NCD surfaces.

Original languageEnglish
Pages (from-to)2925-2930
Number of pages6
JournalPhysica Status Solidi (A) Applications and Materials Science
Issue number9
Publication statusPublished - 2007 Sep

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry


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