Fe-Cr-N ternary films prepared by DC magnetron facing-target sputtering show perpendicular magnetic anisotropy. Upon appropriate adjustment of the chemical composition and deposition parameters, saturation magnetization of 0.37 0.5 Wb/m2 (300-400 emu/cm3) and perpendicular coercivity of 6.4×104-8.8×104 A/m (800-1100 Oe) are detected in the Fe-Cr-N films. X-ray diffraction measurements reveal that the films with large perpendicular anisotropy generally consist of the fine-grain α-Fe(Cr) phase and the γ′-(Fe, Cr)4Nx (x<1) phase having a pronounced (200) texture. By TEM observation, we found that the nonmagnetic γ′-(Fe, Cr)4Nx phase displays columnar growth and that the small ferromagnetic α-Fe(Cr) grains of about 2-20 nm diameter are located at grain boundaries of γ′-(Fe, Cr)4Nx grains in the Fe71Cr20N9 film.
|Journal||Japanese Journal of Applied Physics, Part 2: Letters|
|Issue number||4 B|
|Publication status||Published - 1997|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)