Perpendicular magnetic anisotropy in Pt/Co/AlO trilayer structures depending on AlO thickness and fabrication method

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We investigate the perpendicular magnetic anisotropy dependence on the AlO capping layer in Pt/Co/AlO films. AlO was deposited on Pt/Co films by RF magnetron sputtering and atomic layer deposition (ALD) with varying thickness. It is found that the prolonged deposition of thick AlO layers by RF magnetron sputtering causes significant damage to the Pt/Co underneath while AlO layers formed by ALD can be of arbitrary thickness with no damage to the magnetic properties of the films. The decline of the magnetic properties can be attributed to the method of AlO deposition for each process. In the RF magnetron sputtering, AlO atoms with high kinetic energy are ejected from a sputter target resulting in the degradation of Pt/Co films, while the process of deposition of AlO by ALD is governed by a series of chemically reactive condensations allowing for arbitrary deposition thickness of AlO.

Original languageEnglish
Title of host publicationAdvanced Ceramics and Novel Processing
PublisherTrans Tech Publications Ltd
Pages247-251
Number of pages5
ISBN (Print)9783038351306
DOIs
Publication statusPublished - 2014
Event5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013 - Wuhan, China
Duration: 2013 Dec 92013 Dec 12

Publication series

NameKey Engineering Materials
Volume616
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013
Country/TerritoryChina
CityWuhan
Period13/12/913/12/12

Keywords

  • Atomic layer deposition ALD
  • Perpendicular magnetic anisotropy
  • Pt Co AlO
  • RF magnetron sputtering

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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