Performance test of fresnel zone plate with 50 nm outermost zone width in hard X-ray region

Yoshio Suzuki; Akihisa Takeuchi; Hidekazu Takano; Hisataka Takenaka

doi:10.1143/JJAP.44.1994

Performance test of fresnel zone plate with 50 nm outermost zone width in hard X-ray region

Yoshio Suzuki, Akihisa Takeuchi, Hidekazu Takano, Hisataka Takenaka

Research output: Contribution to journal › Article › peer-review

87 Citations (Scopus)

Abstract

A microfocusing experiment for hard X-rays has been performed to evaluate the performance of Fresnel zone plate optics. A tantalum Fresnel zone plate with an outermost zone width of 50 nm and a thickness of 0.5 μm has been fabricated by electron-beam lithography. The focused beam size measured by a knife-edge scan is 58 nm in full-width at half-maximum for the first-order diffraction at an X-ray energy of 8 keV. It can be concluded that this zone plate has nearly diffraction-limited resolution in the hard X-ray region. The measured diffraction efficiency is 5% at 8 keV. The spot size using the third-order focus of the zone plate is measured to be approximately 30nm.

Original language	English
Pages (from-to)	1994-1998
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	44
Issue number	4 A
DOIs	https://doi.org/10.1143/JJAP.44.1994
Publication status	Published - 2005 Apr 1
Externally published	Yes

Keywords

Fresnel zone plate
Microbeam
Synchrotron radiation
X-ray
X-ray microscopy
Zone plate

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Performance test of fresnel zone plate with 50 nm outermost zone width in hard X-ray region. / Suzuki, Yoshio; Takeuchi, Akihisa; Takano, Hidekazu; Takenaka, Hisataka.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 44, No. 4 A, 01.04.2005, p. 1994-1998.

Research output: Contribution to journal › Article › peer-review

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abstract = "A microfocusing experiment for hard X-rays has been performed to evaluate the performance of Fresnel zone plate optics. A tantalum Fresnel zone plate with an outermost zone width of 50 nm and a thickness of 0.5 μm has been fabricated by electron-beam lithography. The focused beam size measured by a knife-edge scan is 58 nm in full-width at half-maximum for the first-order diffraction at an X-ray energy of 8 keV. It can be concluded that this zone plate has nearly diffraction-limited resolution in the hard X-ray region. The measured diffraction efficiency is 5% at 8 keV. The spot size using the third-order focus of the zone plate is measured to be approximately 30nm.",

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AU - Takano, Hidekazu

AU - Takenaka, Hisataka

PY - 2005/4/1

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N2 - A microfocusing experiment for hard X-rays has been performed to evaluate the performance of Fresnel zone plate optics. A tantalum Fresnel zone plate with an outermost zone width of 50 nm and a thickness of 0.5 μm has been fabricated by electron-beam lithography. The focused beam size measured by a knife-edge scan is 58 nm in full-width at half-maximum for the first-order diffraction at an X-ray energy of 8 keV. It can be concluded that this zone plate has nearly diffraction-limited resolution in the hard X-ray region. The measured diffraction efficiency is 5% at 8 keV. The spot size using the third-order focus of the zone plate is measured to be approximately 30nm.

AB - A microfocusing experiment for hard X-rays has been performed to evaluate the performance of Fresnel zone plate optics. A tantalum Fresnel zone plate with an outermost zone width of 50 nm and a thickness of 0.5 μm has been fabricated by electron-beam lithography. The focused beam size measured by a knife-edge scan is 58 nm in full-width at half-maximum for the first-order diffraction at an X-ray energy of 8 keV. It can be concluded that this zone plate has nearly diffraction-limited resolution in the hard X-ray region. The measured diffraction efficiency is 5% at 8 keV. The spot size using the third-order focus of the zone plate is measured to be approximately 30nm.

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KW - Microbeam

KW - Synchrotron radiation

KW - X-ray

KW - X-ray microscopy

KW - Zone plate

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Performance test of fresnel zone plate with 50 nm outermost zone width in hard X-ray region

Abstract

Keywords

ASJC Scopus subject areas

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