Performance test of fresnel zone plate with 50 nm outermost zone width in hard X-ray region

Yoshio Suzuki, Akihisa Takeuchi, Hidekazu Takano, Hisataka Takenaka

Research output: Contribution to journalArticlepeer-review

92 Citations (Scopus)


A microfocusing experiment for hard X-rays has been performed to evaluate the performance of Fresnel zone plate optics. A tantalum Fresnel zone plate with an outermost zone width of 50 nm and a thickness of 0.5 μm has been fabricated by electron-beam lithography. The focused beam size measured by a knife-edge scan is 58 nm in full-width at half-maximum for the first-order diffraction at an X-ray energy of 8 keV. It can be concluded that this zone plate has nearly diffraction-limited resolution in the hard X-ray region. The measured diffraction efficiency is 5% at 8 keV. The spot size using the third-order focus of the zone plate is measured to be approximately 30nm.

Original languageEnglish
Pages (from-to)1994-1998
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number4 A
Publication statusPublished - 2005 Apr
Externally publishedYes


  • Fresnel zone plate
  • Microbeam
  • Synchrotron radiation
  • X-ray
  • X-ray microscopy
  • Zone plate

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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