Abstract
A microfocusing experiment for hard X-rays has been performed to evaluate the performance of Fresnel zone plate optics. A tantalum Fresnel zone plate with an outermost zone width of 50 nm and a thickness of 0.5 μm has been fabricated by electron-beam lithography. The focused beam size measured by a knife-edge scan is 58 nm in full-width at half-maximum for the first-order diffraction at an X-ray energy of 8 keV. It can be concluded that this zone plate has nearly diffraction-limited resolution in the hard X-ray region. The measured diffraction efficiency is 5% at 8 keV. The spot size using the third-order focus of the zone plate is measured to be approximately 30nm.
| Original language | English |
|---|---|
| Pages (from-to) | 1994-1998 |
| Number of pages | 5 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 44 |
| Issue number | 4 A |
| DOIs | |
| Publication status | Published - 2005 Apr |
| Externally published | Yes |
Keywords
- Fresnel zone plate
- Microbeam
- Synchrotron radiation
- X-ray
- X-ray microscopy
- Zone plate
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)