Performance of the post-focusing mirror system at the reflectometry beamline BL-11D of the Photon Factory

Tadashi Hatano, Shogaku Aihara, Kentaro Uchida, Toshihide Tsuru

Research output: Contribution to journalConference article

4 Citations (Scopus)

Abstract

Beamline BL-11D of the Photon Factory was recently opened for the characterization of extreme-ultraviolet and soft X-ray optical components. For reflectometry of multilayers for soft X-ray microscope optics, a small focus size on the sample surface matching the small acceptances of the curved multilayer samples is required. The post-focusing mirror system of BL-11D is composed of horizontally and vertically focusing elliptical mirrors. The performance was evaluated by microscopic beam profile observation, by a knife-edge scan test, and by the Ronchi test. The FWHM beam size was 120 μm (H) × 30 μm (V) with an insignificant spherical aberration, which is smaller than the requirement.

Original languageEnglish
Article number012010
JournalJournal of Physics: Conference Series
Volume463
Issue number1
DOIs
Publication statusPublished - 2013 Jan 1
Event11th International Conference on X-Ray Microscopy, XRM 2012 - Shanghai, China
Duration: 2012 Aug 52012 Aug 10

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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