Beamline BL-11D of the Photon Factory was recently opened for the characterization of extreme-ultraviolet and soft X-ray optical components. For reflectometry of multilayers for soft X-ray microscope optics, a small focus size on the sample surface matching the small acceptances of the curved multilayer samples is required. The post-focusing mirror system of BL-11D is composed of horizontally and vertically focusing elliptical mirrors. The performance was evaluated by microscopic beam profile observation, by a knife-edge scan test, and by the Ronchi test. The FWHM beam size was 120 μm (H) × 30 μm (V) with an insignificant spherical aberration, which is smaller than the requirement.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 2013 Jan 1|
|Event||11th International Conference on X-Ray Microscopy, XRM 2012 - Shanghai, China|
Duration: 2012 Aug 5 → 2012 Aug 10
ASJC Scopus subject areas
- Physics and Astronomy(all)