Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror

Minoru Sasaki, Shinya Yuuki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A micromirror device is developed realizing the targe-rotation and the low-voltage driving (obtained maximum value is 8.6 degrees at 5 V). The thin film torsion bars, which consist of SiN and Au/Cr films, contribute to this performance. Inside the torsion bar, the tension is included for generating the compliance in the mirror rotation and stiffness in other movements. The performance of the torsion bar is investigated.

Original languageEnglish
Title of host publicationIEEE/LEOS Optical MEMS 2005
Subtitle of host publicationInternational Conference on Optical MEMS and Their Applications
Pages129-130
Number of pages2
DOIs
Publication statusPublished - 2005 Dec 1
EventIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, Finland
Duration: 2005 Aug 12005 Aug 4

Publication series

NameIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Other

OtherIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
CountryFinland
CityOulu
Period05/8/105/8/4

ASJC Scopus subject areas

  • Engineering(all)

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    Sasaki, M., Yuuki, S., & Hane, K. (2005). Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror. In IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications (pp. 129-130). [1540112] (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications). https://doi.org/10.1109/OMEMS.2005.1540112