@article{b3c975bd2b7d49a58db75c18060e721d,
title = "Performance of tense thin-film torsion bar for large rotation and low-voltage driving of micromirror",
abstract = "In this paper, a micromirror device is developed by realizing the large rotation with the low-voltage driving. The maximum rotation angles observed at 5 V are 8.6° with hysteresis and 7° with little hysteresis at the static condition. The thin-film torsion bars contribute to decrease in the torsional spring constant. The tension is included for maintaining the compliance in the rotation of the mirror and for increasing stiffness in other movements. The performance of the torsion bar is investigated. The observed hard-spring effect is significant and this can be explained by the combination of the tension and the vertical displacement of the torsion bar.",
keywords = "Electrostatic driving, Low-voltage driving, Micromirror, Tension, Thin-film torsion bar",
author = "Minoru Sasaki and Shinya Yuki and Kazuhiro Hane",
note = "Funding Information: Manuscript received September 29, 2006; revised November 8, 2006. This work was supported in part by the Japan Science and Technology Agency under Seeds Nourishment Test Research Grant 02-001 in 2004. M. Sasaki is with the Department of Mechanical Systems Engineering, Toyata Technological Institute, Nagoya 468-8511, Japan (e-mail: mnr-sasaki@toyota-ti.ac.jp). S. Yuki is with the Sony Corporation Micro Systems Network Company, Tokyo 141-0001, Japan (e-mail: shinya.yuki@jp.sony.com). K. Hane is with the Department of Nanomechanics and the Department of Mechatronics and Precision Engineering, Tohoku University, Sendai 980-8579, Japan (e-mail: hane@hane.mech.tohoku.ac.jp). Digital Object Identifier 10.1109/JSTQE.2007.892078 Fig. 1. Schematic of the micromirror for illustrating the effect of the tension inside the torsion bar for suppressing the vertical displacement.",
year = "2007",
month = mar,
doi = "10.1109/JSTQE.2007.892078",
language = "English",
volume = "13",
pages = "290--296",
journal = "IEEE Journal on Selected Topics in Quantum Electronics",
issn = "1077-260X",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2",
}