Performance of tense thin-film torsion bar for large rotation and low-voltage driving of micromirror

Minoru Sasaki; Shinya Yuki; Kazuhiro Hane

doi:10.1109/JSTQE.2007.892078

Performance of tense thin-film torsion bar for large rotation and low-voltage driving of micromirror

Minoru Sasaki, Shinya Yuki, Kazuhiro Hane

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

In this paper, a micromirror device is developed by realizing the large rotation with the low-voltage driving. The maximum rotation angles observed at 5 V are 8.6° with hysteresis and 7° with little hysteresis at the static condition. The thin-film torsion bars contribute to decrease in the torsional spring constant. The tension is included for maintaining the compliance in the rotation of the mirror and for increasing stiffness in other movements. The performance of the torsion bar is investigated. The observed hard-spring effect is significant and this can be explained by the combination of the tension and the vertical displacement of the torsion bar.

Original language	English
Pages (from-to)	290-296
Number of pages	7
Journal	IEEE Journal on Selected Topics in Quantum Electronics
Volume	13
Issue number	2
DOIs	https://doi.org/10.1109/JSTQE.2007.892078
Publication status	Published - 2007 Mar 1

Keywords

Electrostatic driving
Low-voltage driving
Micromirror
Tension
Thin-film torsion bar

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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abstract = "In this paper, a micromirror device is developed by realizing the large rotation with the low-voltage driving. The maximum rotation angles observed at 5 V are 8.6° with hysteresis and 7° with little hysteresis at the static condition. The thin-film torsion bars contribute to decrease in the torsional spring constant. The tension is included for maintaining the compliance in the rotation of the mirror and for increasing stiffness in other movements. The performance of the torsion bar is investigated. The observed hard-spring effect is significant and this can be explained by the combination of the tension and the vertical displacement of the torsion bar.",

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AU - Sasaki, Minoru

AU - Yuki, Shinya

AU - Hane, Kazuhiro

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N2 - In this paper, a micromirror device is developed by realizing the large rotation with the low-voltage driving. The maximum rotation angles observed at 5 V are 8.6° with hysteresis and 7° with little hysteresis at the static condition. The thin-film torsion bars contribute to decrease in the torsional spring constant. The tension is included for maintaining the compliance in the rotation of the mirror and for increasing stiffness in other movements. The performance of the torsion bar is investigated. The observed hard-spring effect is significant and this can be explained by the combination of the tension and the vertical displacement of the torsion bar.

AB - In this paper, a micromirror device is developed by realizing the large rotation with the low-voltage driving. The maximum rotation angles observed at 5 V are 8.6° with hysteresis and 7° with little hysteresis at the static condition. The thin-film torsion bars contribute to decrease in the torsional spring constant. The tension is included for maintaining the compliance in the rotation of the mirror and for increasing stiffness in other movements. The performance of the torsion bar is investigated. The observed hard-spring effect is significant and this can be explained by the combination of the tension and the vertical displacement of the torsion bar.

KW - Electrostatic driving

KW - Low-voltage driving

KW - Micromirror

KW - Tension

KW - Thin-film torsion bar

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