Performance of tense thin-film torsion bar for large rotation and low-voltage driving of micromirror

Minoru Sasaki, Shinya Yuki, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Abstract

In this paper, a micromirror device is developed by realizing the large rotation with the low-voltage driving. The maximum rotation angles observed at 5 V are 8.6° with hysteresis and 7° with little hysteresis at the static condition. The thin-film torsion bars contribute to decrease in the torsional spring constant. The tension is included for maintaining the compliance in the rotation of the mirror and for increasing stiffness in other movements. The performance of the torsion bar is investigated. The observed hard-spring effect is significant and this can be explained by the combination of the tension and the vertical displacement of the torsion bar.

Original languageEnglish
Pages (from-to)290-296
Number of pages7
JournalIEEE Journal on Selected Topics in Quantum Electronics
Volume13
Issue number2
DOIs
Publication statusPublished - 2007 Mar 1

Keywords

  • Electrostatic driving
  • Low-voltage driving
  • Micromirror
  • Tension
  • Thin-film torsion bar

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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