Performance of integrated magnetic thin film noise suppressor applied to CMOS noise test chips

Masahiro Yamaguchi, Sho Muroga, Yasushi Endo, Wataru Kodate, Kumpei Yoshikawa, Yuta Sasaki, Makoto Nagata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Performance of soft magnetic CoZrNb film as a thin film noise suppressor and its application to an noise emulator chip fabricated by 90/65nm CMOS technology are discussed. Intra-chip decoupling was studied by the electromagnetic coupling between two miniature coils made on a noise test chip implemented in CMOS 90nm technology. Inter-chip decoupling (radiation) was evaluated by the coupling between parallel line currents implemented in CMOS 65nm technology chip and off-chip planar shielded-loop coil type miniature magnetic probe. The intra-decoupling was as large as 10 dB at 1.8 GHz where ferromagnetic resonance can be maximized. The inter-decoupling was 7.7 dB at 200 MHz where magnetic shielding is effective. It is found that the product of magnetic film thickness and permeability is a good measure to evaluate magnetic shielding effectiveness for IC chip level inter-decoupling.

Original languageEnglish
Title of host publicationEuropean Microwave Week 2011
Subtitle of host publication"Wave to the Future", EuMW 2011, Conference Proceedings - 41st European Microwave Conference, EuMC 2011
Pages49-52
Number of pages4
Publication statusPublished - 2011 Dec 1
Event14th European Microwave Week 2011: "Wave to the Future", EuMW 2011 - 41st EuropeanMicrowave Conference, EuMC 2011 - Manchester, United Kingdom
Duration: 2011 Oct 102011 Oct 13

Publication series

NameEuropean Microwave Week 2011: "Wave to the Future", EuMW 2011, Conference Proceedings - 41st European Microwave Conference, EuMC 2011

Conference

Conference14th European Microwave Week 2011: "Wave to the Future", EuMW 2011 - 41st EuropeanMicrowave Conference, EuMC 2011
CountryUnited Kingdom
CityManchester
Period11/10/1011/10/13

Keywords

  • analog-digital integrated circuits
  • crosstalk magnetic shielding
  • mobile communication

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Yamaguchi, M., Muroga, S., Endo, Y., Kodate, W., Yoshikawa, K., Sasaki, Y., & Nagata, M. (2011). Performance of integrated magnetic thin film noise suppressor applied to CMOS noise test chips. In European Microwave Week 2011: "Wave to the Future", EuMW 2011, Conference Proceedings - 41st European Microwave Conference, EuMC 2011 (pp. 49-52). [6101991] (European Microwave Week 2011: "Wave to the Future", EuMW 2011, Conference Proceedings - 41st European Microwave Conference, EuMC 2011).