The numerical simulation of nanoindentation was used for studying the mechanism of surface deformation of sapphire. The nanoindentation experiments were conducted on (101̄0) and (001) planes of the Al2O 3 crystal. The stress under the tip that penetrated in the (101̄0) and (0001) planes was analyzed using three-dimensional finite element simulation of the contact between spherical indenter and elastically anisotropic solid. The results show that the surface features reflected the distribution of stress.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)