Abstract
The numerical simulation of nanoindentation was used for studying the mechanism of surface deformation of sapphire. The nanoindentation experiments were conducted on (101̄0) and (001) planes of the Al2O 3 crystal. The stress under the tip that penetrated in the (101̄0) and (0001) planes was analyzed using three-dimensional finite element simulation of the contact between spherical indenter and elastically anisotropic solid. The results show that the surface features reflected the distribution of stress.
Original language | English |
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Pages (from-to) | 5214-5216 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 83 |
Issue number | 25 |
DOIs | |
Publication status | Published - 2003 Dec 22 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)