Peculiar surface deformation of sapphire: Numerical simulation of nanoindentation

R. Nowak, T. Manninen, K. Heiskanen, T. Sekino, A. Hikasa, K. Niihara, T. Takagi

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Abstract

The numerical simulation of nanoindentation was used for studying the mechanism of surface deformation of sapphire. The nanoindentation experiments were conducted on (101̄0) and (001) planes of the Al2O 3 crystal. The stress under the tip that penetrated in the (101̄0) and (0001) planes was analyzed using three-dimensional finite element simulation of the contact between spherical indenter and elastically anisotropic solid. The results show that the surface features reflected the distribution of stress.

Original languageEnglish
Pages (from-to)5214-5216
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number25
DOIs
Publication statusPublished - 2003 Dec 22

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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