Thin diamond films were prepared by hot-filament chemical vapor deposition. Selective seeding with ultrafine diamond powder was performed to obtain patterned polycrystalline films. The films were characterized by scanning electron microscopy, X-ray diffraction analysis, and Raman spectroscopy.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 2000 May|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films