Patterning of polycrystalline diamond thin films on a variety of substrates by selectively seeding with purified ultrafine diamond powder

H. W. Liu, C. X. Gao, X. Li, C. X. Wang, Y. H. Han, G. T. Zou, W. K. Wang, L. L. Sun, C. Wen

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Thin diamond films were prepared by hot-filament chemical vapor deposition. Selective seeding with ultrafine diamond powder was performed to obtain patterned polycrystalline films. The films were characterized by scanning electron microscopy, X-ray diffraction analysis, and Raman spectroscopy.

Original languageEnglish
Pages (from-to)1041-1044
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume18
Issue number3
DOIs
Publication statusPublished - 2000 May 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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