Patterning of Langmuir-Blodgett film with ultrahigh vacuum-scanning tunneling microscope/atomic force microscope

H. Hamanaka, T. Ono, M. Esashi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

We performed a patterning of a stearic acid Langmuir-Blodgett·(LB) film on a Si substrate with ultrahigh vacuum scanning probe microscope. The patterning was. carried out with a conducting Si cantilever probe by applying positive or negative bias voltages to the sample. When a negative bias (-10 V) was applied, one monolayer of the LB film was extracted. On the other hand, when a positive sample bias (+10V) was applied, the scanned area was protruded. This extraction mechanism is explained in terms of the force caused by permanent and induced dipole moments. Further, SiO2 was selectively deposited on the patterned area using SiCl4 and H2O.

Original languageEnglish
Pages (from-to)1414-1418
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume15
Issue number4
Publication statusPublished - 1997 Jul 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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