Patterning of biomolecules on silicon by AFM oxidation

T. Yoshinobu, W. C. Moon, A. Nishikawa, J. Suzuki, H. Iwasaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The micropatterning of biomolecules on silicon was investigated by using atomic force microscopy (AFM) anodic oxidation technique. The oxide patterns were drawn on the surface by applying a dc voltage between a conductive AFM tip and the Si substrate. The oxide patterns are then used as templates for immobilization of biomolecules with the help of linker molecules. The AFM imaging prior to patterning allowed precise alignment of patterns to existing structures such as field effect transistors (FET) and microelectrodes.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
Pages336-337
Number of pages2
Publication statusPublished - 2004
Externally publishedYes
Event2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
Duration: 2004 Oct 262004 Oct 29

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2004

Other

Other2004 International Microprocesses and Nanotechnology Conference
CountryJapan
CityOsaka
Period04/10/2604/10/29

ASJC Scopus subject areas

  • Engineering(all)

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