Pattern transfer of self-ordered structure with diamond mold

Takahito Ono, Chihiro Konoma, Hidetoshi Miyashita, Yoshiaki Kanamori, Masayoshi Esashi

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

A diamond, mold patterned into self-ordered honeycomb structures was fabricated and pattern transfer was demonstrated with this mold. A diamond film was deposited onto a silicon substrate by hot-filament chemical vapor deposition and bonded with Pyrex glass by an anodic bonding technique. By removing the silicon substrate, the diamond film with a flat surface was formed on the Pyrex glass. The high aspect ratio of the pattern with 100 nm-pitch honeycomb structures was formed on the diamond thin film by a fast-atom beam of oxygen using an ordered porous alumina film as a mask. A dot pattern was transferred onto a polymethylmethacrylate (PMMA) film by an imprinting technique.

Original languageEnglish
Pages (from-to)3867-3870
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number6 B
Publication statusPublished - 2003 Jun 1

Keywords

  • Diamond mold
  • Fast atom beam
  • Nanoimprint lithography
  • Pattern transfer
  • Porous almina

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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