Passivated piezoresistive rotation angle sensor integrated in micromirror

Minora Sasaki, Motoki Tabata, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint Dive into the research topics of 'Passivated piezoresistive rotation angle sensor integrated in micromirror'. Together they form a unique fingerprint.

Engineering & Materials Science