Passivated piezoresistive rotation angle sensor integrated in micromirror

Minora Sasaki, Motoki Tabata, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A piezoresistive rotation angle sensor integrated in a micromirror device is improved with the passivation film. The sensor detects the shear stress inside the torsion bar generated by the mirror rotation under the electrostatic driving. The rotation angle is measured during the actuation. The passivation film reduces the leak current. The sensor signal shows the better performance showing the smaller hysteresis.

Original languageEnglish
Title of host publication2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Pages193-194
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China
Duration: 2007 Aug 122007 Aug 16

Publication series

Name2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
CountryTaiwan, Province of China
CityHualien
Period07/8/1207/8/16

Keywords

  • Micromirror
  • Passivation film
  • Rotation angle sensor

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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