TY - JOUR
T1 - Parylene-gate isfet and chemical modification of its surface with crown ether compounds
AU - Matsuo, T.
AU - Nakajima, H.
AU - Osa, T.
AU - Anzai, J.
N1 - Funding Information:
The authors express their sincere appreciation to Mr Yuklo Katayanagul of the Department of Electromc Engmeermg, Tohoku University, for his helpful aswstance m the fabrication and measurement of the chemlcally-modtiled ISFETs This research was supported m part by the 13th Mltsublshl Foundation Grant m Natural Sciences, 1982
PY - 1986/4
Y1 - 1986/4
N2 - A hydrophobic polymer such as parylene has ion dissociation sites of extremely low density. An electrolyte-parylene interface manifests a constant potential independent of solution composition. The parylene-gate ISFET can be used as a solid state reference electrode. These films can also be used for the substrate of a CHEMFET, where the recent chemical modification technology is introduced. In this paper, the concept of a parylene-gate ISFET based on the site-binding model is investigated. As applications, a probe-type all solid state pH sensor integrating an Si3N4 gate, a parylene gate and an Au pseudo-reference electrode is discussed. A pK ISFET chemically modified with crown ether compounds is also reported.
AB - A hydrophobic polymer such as parylene has ion dissociation sites of extremely low density. An electrolyte-parylene interface manifests a constant potential independent of solution composition. The parylene-gate ISFET can be used as a solid state reference electrode. These films can also be used for the substrate of a CHEMFET, where the recent chemical modification technology is introduced. In this paper, the concept of a parylene-gate ISFET based on the site-binding model is investigated. As applications, a probe-type all solid state pH sensor integrating an Si3N4 gate, a parylene gate and an Au pseudo-reference electrode is discussed. A pK ISFET chemically modified with crown ether compounds is also reported.
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U2 - 10.1016/0250-6874(86)80013-0
DO - 10.1016/0250-6874(86)80013-0
M3 - Article
AN - SCOPUS:0022705109
SN - 0250-6874
VL - 9
SP - 115
EP - 123
JO - Sensors and Actuators
JF - Sensors and Actuators
IS - 2
ER -