Parametrically driven resonant micro-mirror scanner with tunable springs

Jinhyeok Kim, Yusuke Kawai, Naoki Inomata, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

In this paper, we design, fabricate and evaluate a resonant micro-mirror able to amplify the vibration amplitude using parametric amplification. In addition, the spring constant of torsion bars supporting the micro-mirror can be varied by stress generated using an electrothermal actuator, which can tune the resonant frequency of the torsional modes. The parametric amplification of the vibration of the torsional mode is demonstrated by applying a pumping signal using the electrothermal actuator.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages580-583
Number of pages4
DOIs
Publication statusPublished - 2013 Apr 2
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 2013 Jan 202013 Jan 24

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period13/1/2013/1/24

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Kim, J., Kawai, Y., Inomata, N., & Ono, T. (2013). Parametrically driven resonant micro-mirror scanner with tunable springs. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 580-583). [6474308] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474308