Parametrically actuated resonant micromirror using stiffness tunable torsional springs

Yusuke Kawai, Jin Hyeok Kim, Naoki Inomata, Takahito Ono

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


In this study, we design, fabricate and evaluate a resonant micromirror that can amplify the vibration amplitude by mechanical parametric ampliication. It is shown that the spring constant of torsion bars supporting the micromirror can be varied by stress generated using an electrothermal actuator, which can tune the resonant frequency of the torsional mode. The parametric ampliication of the vibration of the torsional mode is demonstrated by applying a pumping signal using the electrothermal actuator in addition to a driving signal. As the driving power increases, the resonant frequency increases owing to the nonlinear spring effect of the torsional spring. However, the frequency shift can be compensated for by applying stress to the torsional spring using the frequency tuning mechanism for the reliable operation of the micromirror.

Original languageEnglish
Pages (from-to)131-139
Number of pages9
JournalSensors and Materials
Issue number2
Publication statusPublished - 2016


  • Frequency tuning
  • Hard spring effect
  • Micromirror
  • Parametric ampliication
  • Torsional spring

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)


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