Parallelism measurement of the slide axis with respect to the spindle axis of a diamond turning machine

Jungchul Lee, Youngjin Noh, Yoshikazu Arai, Wei Gao, Jooho Hwang, Chunhong Park

Research output: Contribution to conferencePaper

Abstract

To measure the parallelism error between the Z-slide axis and the spindle axis of the ultra precision diamond turning machine which has a T-base design with a spindle, an X-slide and a Z-slide, the rotating reversal method is carried out. Two capacitance probes are employed for the measurement of the cylinder workpiece(for rotating) which was installed on the spindle. The straightness error of the Z-slide of the ultra-precision diamond turning machine was measured to be about 100 nm and parallelism error was evaluated to be approximately 0.84 arc-second of the Z-slide by the rotating reversal method over a movement range of 126 mm.

Original languageEnglish
Publication statusPublished - 2009 Dec 1
Event5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
Duration: 2009 Dec 22009 Dec 4

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
CountryJapan
CityOsaka
Period09/12/209/12/4

Keywords

  • Error motion
  • Machine tool
  • Measurement
  • Parallelism
  • Reversal method

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Lee, J., Noh, Y., Arai, Y., Gao, W., Hwang, J., & Park, C. (2009). Parallelism measurement of the slide axis with respect to the spindle axis of a diamond turning machine. Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.