Parallel electron beam micro-column with self-aligned carbon nanotube emitters

C. H. Tsai, J. Y. Ho, T. Ono, M. Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, we have proposed, fabricated and characterized a parallel electron beam micro-column with single-stranded carbon nanotube (CNT) filed emitters. The integrated micro-column consists of a self-aligned CNT field emitter array (FEA), and a multi-layered electrostatic Si focusing lens array. In our design, the emitters, gate and electrostatic lens array are electrically isolated, and each source can be controlled individually. Electron emission performance of the fabricated CNT/Si emitter was characterized. The best turn-on fields, defined as the field required to generate an emission current of 1 nA, were approximately 6 V. When applying a gate voltage of 100 V, a 110 nA anode current is measured. It is seen that CNT/Si emitter showed low threshold voltage; however, the emission current fluctuation was high during high voltage operation.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages355-358
Number of pages4
DOIs
Publication statusPublished - 2008
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 2008 Jan 132008 Jan 17

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/TerritoryUnited States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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