Parallel array of noise-activated nonlinear micro-resonators with integrated actuators

Yusuke Yoshida, Yusuke Kawai, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a robust sensing method using nonlinear micromechanical resonators for applications such as resonant mass and thermal radiation sensors. Resonators show stochastic response by applying noise, in which resonators show two vibration states, i.e. large vibration amplitude state and small vibration amplitude state. Single resonator acts as a bistable element, and from responses of the parallel array, the response can be averaged and the total noise can be decreased. We have designed and fabricated such piezoelectric resonator array with ability of self-sensing and self-actuation, and demonstrated noise-activated detection of heat from light. This kind of noise-activated system can be highly robust against external noise and have potential applications to various sensors operated in noisy conditions.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages613-616
Number of pages4
DOIs
Publication statusPublished - 2011 Apr 13
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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