TY - JOUR
T1 - Palm-top size X-ray microanalyzer using a pyroelectric focused electron beam with 100-micro-meter diameter
AU - Kawai, Jun
AU - Ohtani, Issei
AU - Imanishi, Akira
AU - Imashuku, Susumu
N1 - Copyright:
Copyright 2018 Elsevier B.V., All rights reserved.
PY - 2014
Y1 - 2014
N2 - We have developed a palm-top size EPMA (electron probe X-ray microanalyzer), operated by 3 V electric battery except for a rotary vacuum pump. The electron beam was generated by a pyroelectric single crystal, LiTaO3. A needle was used to make a focused electron beam. The smallest beam size was 100 μm on the sample surface. The X-ray spectra were measured through a Kapton window by a Si-PIN detector for a model specimen containing TiO2 and MnO2 particles, which was an aerosol model specimen, where TiO2 and MnO2 particles of size about 100-200 μm were separated by a few hundreds micrometers. By moving the sample stage manually, the X-ray spectra were measured for 300 s each by 300 μm e-beam, and the measured X-ray intensities were strong enough for identification of the major element in individual 100-200 μm size aerosol particles.
AB - We have developed a palm-top size EPMA (electron probe X-ray microanalyzer), operated by 3 V electric battery except for a rotary vacuum pump. The electron beam was generated by a pyroelectric single crystal, LiTaO3. A needle was used to make a focused electron beam. The smallest beam size was 100 μm on the sample surface. The X-ray spectra were measured through a Kapton window by a Si-PIN detector for a model specimen containing TiO2 and MnO2 particles, which was an aerosol model specimen, where TiO2 and MnO2 particles of size about 100-200 μm were separated by a few hundreds micrometers. By moving the sample stage manually, the X-ray spectra were measured for 300 s each by 300 μm e-beam, and the measured X-ray intensities were strong enough for identification of the major element in individual 100-200 μm size aerosol particles.
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U2 - 10.1088/1742-6596/499/1/012011
DO - 10.1088/1742-6596/499/1/012011
M3 - Conference article
AN - SCOPUS:84899554745
VL - 499
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012011
T2 - 22nd International Congress on X-Ray Optics and Microanalysis, ICXOM 2013
Y2 - 2 September 2013 through 6 September 2013
ER -