We have developed a palm-top size EPMA (electron probe X-ray microanalyzer), operated by 3 V electric battery except for a rotary vacuum pump. The electron beam was generated by a pyroelectric single crystal, LiTaO3. A needle was used to make a focused electron beam. The smallest beam size was 100 μm on the sample surface. The X-ray spectra were measured through a Kapton window by a Si-PIN detector for a model specimen containing TiO2 and MnO2 particles, which was an aerosol model specimen, where TiO2 and MnO2 particles of size about 100-200 μm were separated by a few hundreds micrometers. By moving the sample stage manually, the X-ray spectra were measured for 300 s each by 300 μm e-beam, and the measured X-ray intensities were strong enough for identification of the major element in individual 100-200 μm size aerosol particles.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 2014|
|Event||22nd International Congress on X-Ray Optics and Microanalysis, ICXOM 2013 - Hamburg, Germany|
Duration: 2013 Sep 2 → 2013 Sep 6
ASJC Scopus subject areas
- Physics and Astronomy(all)