Palm-top size X-ray microanalyzer using a pyroelectric focused electron beam with 100-micro-meter diameter

Jun Kawai, Issei Ohtani, Akira Imanishi, Susumu Imashuku

Research output: Contribution to journalConference articlepeer-review

Abstract

We have developed a palm-top size EPMA (electron probe X-ray microanalyzer), operated by 3 V electric battery except for a rotary vacuum pump. The electron beam was generated by a pyroelectric single crystal, LiTaO3. A needle was used to make a focused electron beam. The smallest beam size was 100 μm on the sample surface. The X-ray spectra were measured through a Kapton window by a Si-PIN detector for a model specimen containing TiO2 and MnO2 particles, which was an aerosol model specimen, where TiO2 and MnO2 particles of size about 100-200 μm were separated by a few hundreds micrometers. By moving the sample stage manually, the X-ray spectra were measured for 300 s each by 300 μm e-beam, and the measured X-ray intensities were strong enough for identification of the major element in individual 100-200 μm size aerosol particles.

Original languageEnglish
Article number012011
JournalJournal of Physics: Conference Series
Volume499
Issue number1
DOIs
Publication statusPublished - 2014
Event22nd International Congress on X-Ray Optics and Microanalysis, ICXOM 2013 - Hamburg, Germany
Duration: 2013 Sep 22013 Sep 6

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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