Oxygen pressure dependence of the initial oxidation on Si[001] surface studied by AES combined with

Yuji Takakuwa, F. Ishida, T. Kawawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2001 International Microprocesses and Nanotechnology Conference, MNC 2001
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages110-111
Number of pages2
ISBN (Electronic)4891140178, 9784891140175
DOIs
Publication statusPublished - 2001 Jan 1
EventInternational Microprocesses and Nanotechnology Conference, MNC 2001 - Shimane, Japan
Duration: 2001 Oct 312001 Nov 2

Publication series

Name2001 International Microprocesses and Nanotechnology Conference, MNC 2001

Other

OtherInternational Microprocesses and Nanotechnology Conference, MNC 2001
CountryJapan
CityShimane
Period01/10/3101/11/2

ASJC Scopus subject areas

  • Biotechnology
  • Fluid Flow and Transfer Processes
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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