Abstract
This paper presents the effect of oxygen on the microstructure of Co - 18 at. % Pt perpendicular medium. Oxygen addition to the CoPt films during high Ar pressure (4 Pa) sputtering successfully increased the perpendicular coercivity. 188 kA/m coercivity and 1.2 tesla (T) saturation magnetization were obtained. The perpendicular anisotropy energy was at least 570 kJ/m3. AEM and EDX measurements revealed that the film was composed of crystal grains and amorphous boundaries and that oxygen segregated clearly inside the amorphous boundaries. A TEM image showed a 10 nm grain diameter independent of the oxygen partial pressure. For CoPt films deposited under a lower Ar pressure (2 Pa), oxygen has been found to exist uniformly within the grains and boundaries and showed no significant effect on coercivity.
| Original language | English |
|---|---|
| Pages (from-to) | 4026-4028 |
| Number of pages | 3 |
| Journal | IEEE Transactions on Magnetics |
| Volume | 30 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1994 Nov |
| Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering