Oxidizing species dependence of the interface reaction during atomic-layer-deposition process and post-deposition-anneal

T. Suwa, A. Teramoto, Y. Koda, M. Saito, H. Sugita, M. Hayashi, J. Tsuchimoto, H. Ishii, Y. Shiba, Y. Shirai, S. Sugawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Oxidizing species dependence of the interface reaction during atomic-layer-deposition process and post-deposition-anneal'. Together they form a unique fingerprint.

Earth and Planetary Sciences

Physics

Engineering

Material Science

Biochemistry, Genetics and Molecular Biology