Fingerprint
Dive into the research topics of 'Oxidizing species dependence of the interface reaction during atomic-layer-deposition process and post-deposition-anneal'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Oxidizing species dependence of the interface reaction during atomic-layer-deposition process and post-deposition-anneal
T. Suwa, A. Teramoto, Y. Koda, M. Saito, H. Sugita, M. Hayashi, J. Tsuchimoto, H. Ishii, Y. Shiba, Y. Shirai, S. Sugawa
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)