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Oxide and interface trap densities estimation in ultrathin W/La 2O 3/Si MOS capacitors
M. Mamatrishat, T. Kubota, T. Seki, K. Kakushima, P. Ahmet, K. Tsutsui, Y. Kataoka, A. Nishiyama, N. Sugii, K. Natori, T. Hattori, H. Iwai
Research output: Contribution to journal › Article › peer-review
6
Citations
(Scopus)