Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions

S. Yoshimura, Y. Narisawa, T. Nozawa, M. Tsunoda, M. Takahashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationINTERMAG ASIA 2005
Subtitle of host publicationDigests of the IEEE International Magnetics Conference
Number of pages1
Publication statusPublished - 2005 Dec 12
EventINTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference - Nagoya, Japan
Duration: 2005 Apr 42005 Apr 8

Publication series

NameINTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference

Other

OtherINTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference
CountryJapan
CityNagoya
Period05/4/405/4/8

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yoshimura, S., Narisawa, Y., Nozawa, T., Tsunoda, M., & Takahashi, M. (2005). Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions. In INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference (INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference).